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From Structure to function: Towards an atomistic understanding of the action of additives relevant for the Damascene and TSV copper plating
From Structure to function: Towards an atomistic understanding of the action of additives relevant for the Damascene and TSV copper plating
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Date of Publication
2012
Publication Type
Conference Item
Subject(s)
500 Science
>
570 Life sciences; biology
500 Science
>
540 Chemistry
Language(s)
en
Contributor(s)
Nguyen, H.
Broekmann, Peter
Departement für Chemie und Biochemie (DCB)
Flügel, A.
Mayer, D.
Simona, Fabio
Departement für Chemie und Biochemie (DCB)
Cascella, Michele
Departement für Chemie und Biochemie (DCB)
Additional Credits
Departement für Chemie und Biochemie (DCB)
Series
Book of Abstracts
Title of Event
CMD-24 / 24th General Conference of the Condensed Matter Division of the European Physical Society
Access(Rights)
metadata.only
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