A highly sensitive a-Si photodetector array with integrated filter for optical detection in MEMS
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Publisher DOI
Date of Publication
2009
Publication Type
Article
Language(s)
en
Contributor(s)
Moridi, M | |
Tanner, S | |
Wyrsch, N | |
Farine, P.A. |
Additional Credits
Series
Procedia chemistry
Publisher
Elsevier
ISSN
1876-6196
Access(Rights)
metadata.only